| Measurement wavelength range |
130 nm to 260 nm
200 nm to 400 nm (with optional photomultiplier tube) |
| Light source |
Deuterium lamp (30 W) |
| Measurement optics |
Double-beam optics |
| Spectrometer |
|
| Mount |
Seya-Namioka mount |
| Radius of curvature |
200 mm |
| Diffraction grating |
Concave grating (holographic) |
| Groove density |
1200 grooves/mm |
| Blaze wavelength |
150 nm |
| Reciprocal linear dispersion |
4 nm/mm (at 155.5 nm) |
| Slit |
Width: 0.005 mm to 2.5 mm (manually continuously variable)
Height: 4 mm (fixed) |
| Wavelength drive |
Stepping motor drive |
| Scan speed |
600, 300, 150, 60, 30, 15, 6, 3, 1.5 nm/mm |
| Wavelength per pulse |
0.01 nm/pulse |
| Vacuum high-temperature furnace |
|
| Maximum temperature |
2,000°C |
| Temperature range |
Room temperature to 2,000°C |
| Atmosphere |
Vacuum, inert gas |
| Ultimate vacuum |
On the order of 10-6 Torr |
| Atmosphere pressure |
0.07 kg/cm2 |
| Uniform heating zone size |
10 mm (W) × 10 mm (D) × 10 mm (H) |
| Cryostat |
|
| Temperature range |
4.2 K to 500 K |
| Temperature stability |
±0.1 K |
| Sample space |
φ15 mm × 3 mm |
| Vacuum pumping system |
|
| Turbomolecular pumps |
520 L/min × 1
160 L/min × 1 |
| Rotary pumps |
800 L/min × 1
150 L/min × 1 |
