UV-VIS Microscopic Imaging Spectroscopy System
MISM-08 |
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This system was developed for in-situ two-dimensional spectroscopic measurements of microscopic areas inside a vacuum chamber at a rate of 3–5 fps. Microscope optics with chromatic aberration correction across the ultraviolet and visible regions enable two-dimensional spectroscopic measurements from 250 nm to 600 nm. Designed to measure samples inside a vacuum chamber, the system provides long working distances of approximately 270 mm at approximately 2.5× magnification and approximately 168 mm at approximately 4.8× magnification. |
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■Two-Dimensional Spectroscopic Measurement Examples |
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| Measurement Data 1 |
Measurement Data 2 |
- Sample: Test target
- Wavelength: 500 nm
- Magnification: Approximately 2.5×
- Measurement area: Approximately 1.2 mm × 1.1 mm
- Measurement time: Approximately 280 ms
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- Sample: Test target
- Wavelength: 253.7 nm
- Magnification: Approximately 4.8×
- Measurement area: Approximately 0.63 mm × 0.2 mm
- Measurement time: Approximately 200 ms
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■Specifications |
| Wavelength Range |
250 nm–600 nm |
| Wavelength Resolution |
Approximately 0.34 nm/pixel |
| Magnification |
Approximately 2.5× and 4.8× |
| Working Distance |
Approximately 270 mm (at approximately 2.5×), approximately 168 mm (at approximately 4.8×) |
| Spatial Resolution |
20 μm (at approximately 2.5×), 10 μm (at approximately 4.8×) |
| Measurement Area |
Approximately 1.24 mm × 1.24 mm (at approximately 2.5×), approximately 0.64 mm × 0.64 mm (at approximately 4.8×) |
| Measurement Rate |
3–5 fps
*Measurement time varies depending on the frame size. |
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*Specifications and appearance are subject to change without notice for product improvement. |
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